Adjusts Laser Beam, Adjusts Parameter Settings During Observation, and Performs Image Processing Automatically

Operating time when using standard samples and standard cantilever: about 5 minutes*
* For automatic observation with 1 μm square field of view and 256 × 256-pixel resolution. Operating times can vary depending on the operator.

Previous SPM systems required practice adjusting the light beam, adjusting parameter settings during observations, and processing image data, but the SPM-Nanoa automates those processes to help ensure stress-free operations.

Extensive Functionality

Capture Sharp Images with All Modes from Optical to SPM Microscopy

Targets can be searched by an optical microscope, and magnified observation is facilitated by SPM.
Other physical property information can be obtained with the same field-of-view as the surface shape image.

Sample: SiO₂ patterns on Si

Wide Variety of Observation Modes

Supports a wide variety of observation modes, from observing shapes to mapping physical properties based on force curve measurements.
That means physical properties can be evaluated with high resolution.

* Optional

Search for Targets Easily

Targets can be searched for easily in sharp optical microscope images without vibration effects.
The SPM-Nanoa combines a high-performance optical microscope and SPM unit in a single integrated system.

View Test Patterns

With the integrated optical microscope (left), the periodic structure of a 3 μm interval on the sample surface can be clearly observed.

Observe Localized Physical Properties with High Resolution

The deformation of extremely soft samples or differences in the mechanical or electrical properties of samples can be observed with high resolution, even if such characteristics are localized.

KPFM Mode Observation of Gold Nanoparticles on Mica Substrate

This shows a surface potential image (right) acquired with the same field-of-view as a 0.2 μm shape image (left).

8K Images Enable High-Resolution Observation of Large Areas

Detailed structures can be observed even in images of large areas. High-resolution observation is achieved with up to 8K (8192 × 8192) pixels.

Observation of Vapor-Deposited Metal Coating

Saves Time

Various Support Functionality Achieves Fast Observation

Observation times have been significantly shortened with faster observation and physical property-mapping processes.
Simple sample and cantilever replacement processes ensure the system can be prepared for observations quickly.

Three functions enable significantly shorter observation times.

High-Throughput Observation Fast Physical Property Mapping

Simple & Smooth Sample Replacement

Easy and Reliable Cantilever Replacement

High-Throughput Observation
Fast Physical Property Mapping

The data acquisition time required for observation and mapping physical properties has been significantly shortened by using a high-throughput scanner that achieves a fast response and by optimizing the control algorithm.

* Actual observation times will vary depending on parameter settings.

Simple & Smooth Sample Replacement

Samples can be placed and removed by opening/closing the stage with a single click. Because the system maintains the laser beam position, samples can be observed immediately after replacement.

Easy and Reliable Cantilever Replacement –Cantilever Master (Option)–

Cantilevers can be installed by simply placing the cantilever in the specified position and then sliding it along the guide. That ensures cantilevers can be replaced easily and reliably even by operators not used to using tweezers.

The new HR-SPM scanning probe microscope uses frequency detection.
his instrument is not only capable of ultra-high resolution observations in air or liquids, but for the first time enables observations of hydration/solvation layers at solid-liquid interfaces.

Existing SPMs (scanning probe microscopes) and AFMs (atomic force microscopes) generally use AM (amplitude modulation). In principle however, the FM (frequency modulation) measurement method enables higher imaging resolution.

High Resolution

• Uses the FM-AFM method
• Noise in air and liquids is reduced to 1/20th that of existing methods.
• Achieves the performance level of a vacuum-type SPM, even in air and liquids!

Improved Usability

• The installation of the HT scanner has expanded the observation area and increased speed.
• Dual monitors and signal capabilities greater flexibility

Atomic Resolution Observations in Solution

Observations were made of the arrangement of atoms on a NaCl surface in a saturated aqueous solution. Atoms hidden by noise in existing AFM observations (AM method, left) are clearly visible when the FM method (right) is used. The FM method provides true atomic resolution.

Pt Catalyst Particles Observation in Air​

Pt catalyst particles in a TiO₂ substrate were identified, and the surface potential was measured using a KPFM. Pt particles several nm in size were observed in the exchange of charges with the substrate. In the figure on the right, the red circles indicate positive potential, and the blue circles indicate negative potential. It is evident that the resolution has been dramatically improved, even for a KPFM.
 

Note: KPFM functionality is available on a special order basis.

Cited References

• Ryohei Kokawa, Masahiro Ohta, Akira Sasahara, Hiroshi Onishi, Kelvin Probe Force Microscopy Study of a Pt/TiO₂ Catalyst Model Placed in an Atmospheric Pressure of N₂ Environment, Chemistry – An Asian Journal, 7, 1251-1255 (2012).

High-Throughput Scanner Shortens Observation Times

Due to the new deveopled HT scanner that achieves a high-speed response and optimizing softwares and the design of control system, aquisition of the image data is now available at a speed of conventional than 5 times or more(our ratio). The scanner can easily be replaced so existing scanners can be used. The HT scanner can also be added to an existing SPM-9700 unit to enable high-throughput observation.

Analysis Example
Surface Roughness Analysis of a Vapor-Deposited Metal Film

The surface topology of a vapor-deposited metal film was observed using a scanning rate of 1 Hz and 5 Hz.
Image quality and surface roughness analysis results are equivalent.

Grating Surface Topology Measurement

The grating surface topology was observed at a scanning rate of 1 Hz and 5 Hz. The measurement by cross-section profile analysis shows that both give the same results.

High Stability & High Throughput

With the optical lever system and cantilever integrated in the head, samples can be replaced by simply sliding the head. Since samples can be changed without shutting off the laser beam, laser irradiation characteristics remain highly stable even after changing the sample. This eliminates the need to readjust the optical axis or other parameters associated with stopping the laser, which means analysis times can be shortened.

High Stability

• The laser remains stable and irradiating the cantilever even while replacing samples.
• Design is resistant to vibration, noise, wind, and other external disturbances, so a specialized enclosure is not necessary.
• The main unit includes a built-in vibration isolator.

Secret to the High Throughput of the SPM-9700HT

Remarkable Mechanism Optimized for Ease of Operation

－Comparison of Throughput for Differences in Replacing Samples－

Cantilever Mounting Jig

This jig ensures easy and secure mounting of the cantilever.

1. Mount the cantilever holder on the mounting jig and fix the holder using the holder fixing knob.
   Then, press the presser bar release pin.
   (The cantilever presser bar lifts up.)

1. Place the cantilever on the slide.
   Pause a moment at this stage!
   You can release and pinch the cantilever again in this step!

1. Move the cantilever from the slide to the holder.
   ( The cantilever is set properly! )

1. Press the presser bar setting lever slowly.
   The presser bar release pin will return and the cantilever will be fixed.

Applicable Cantilever Holders
Standard holders for AFM, holders for electric current, holders for minute electric current, and holders for KFM

1. This jig cannot be used for cantilever holders for solution cells.

Product Configuration
1) Mounting jig main unit 1
2) Hexagon wrench for adjustment 4
3) Holding case 1
4) Instruction manual 1
* Patent pending

Wide Variety of 3D Rendering Functions Using Mouse Operations

Images can be freely rotated, zoomed, and Z-axis magnification varied using the mouse to intuitively adjust the viewing angle or magnification level. Using sophisticated analytical tools, such as a texture function, which displays sample physical properties overlaid with height information, or a 3D cross-section profile analysis function, dramatically improves the efficiency of image verification work.

Zoom

Rotation

Change Z-Axis Magnification

Texture Function

Height information can be displayed overlaid with information about other physical properties. This allows clearly showing the relationship between both parameters.

3D Cross-Section Profile Analysis

Cross-section profiles can be analyzed in 3D images. If physical property information is expressed in terms of texture, respective cross-section profiles can be displayed and analyzed in the same location.

Nano 3D Mapping

Nanophysics Evaluation System

Visualizing the Physical Properties of Nano-Regions on Surface or Interface

The physical properties of external or boundary surfaces can be evaluated by measuring the force acting on a
scanning probe microscope cantilever probe as its distance from the sample is varied (force curve measurement).

1. The adhesive force and Young’s modulus can be evaluated at a specific target location by measuring the force curve at that point (point analysis).
2. By acquiring force curves at multiple points, a two-dimension map of the physical properties can be created (mapping analysis).
3. Acquired data can be displayed three-dimensionally, or specific data can be extracted for data analysis (3D analysis).

Evaluating Physical Properties at Any Point on a Film

Force curves were measured at arbitrary points on a film surface. The results show that the adhesive force is different at the respective points.
Similarly, physical properties can also be evaluated on small soft samples, such as biopolymers.

3D Analysis

All force curves acquired for mapping are saved.
Therefore, the data can be displayed three-dimensionally, or specific cross sections can be extracted for data analysis.

Mapping the Physical Properties of Plastic Films

Mapping analysis can be used to measure adhesive force and Young’s modulus as well as surface topography. The figure shows a quantitative visualization of the Young’s modulus within a localized area only 300 nm wide on a plastic film surface. (Sample source: MORESCO).


Application example: Evaluating the uniformity of a polymer material surface

Adhesive Part of an Adhesive Tape

These images are from an evaluation of the adhesive part of an adhesive tape. They show that the adhesive force is distributed non-uniformly. This demonstrates how the system can be used to evaluate adhesive properties, which were difficult to evaluate using conventional methods.

Main Specifications

Force Curve

Mapping

SPM-9700 Scanning Probe Microscope

Ease of Operation Minimizes Distraction from Observation to Analysis

A guidance function to guide users through procedures, a navigation function that eliminates uncertainty about the observation position, and other features help ensure observations can be performed quickly and smoothly.

A revolutionary layout-free user interface (GUI) is used that provides borderless support for operations ranging from online observation to offline analysis. This means the SPM can be operated from observation to determining observation position and obtaining observation results without confusion.Operate Without Confusion

From startup to observation and analysis, the SPM can be operated using only mouse-clicks, without requiring any complicated settings

(1) Startup

Select the observation mode in the [Manager] window.

(2) Setup

Follow the steps indicated in the guidance window to easily complete setup.

(3) Start Observation

Clicking the [Observation Start] button performs all operations automatically, from approach to observation.

(4) Display

Image data obtained in the past can be viewed without switching offline.

(5) Offline Analysis

A wide selection of functions for displaying, processing, and analyzing images are available for expressing observation results more attractively and quantitatively.

Determine the Observation Position Without Confusion

(1) Observation Window

Up to 8 images can be displayed simultaneously. This means the surface shape and physical properties can be compared in multiple images, while scanning.

(2) Navigator

The Navigator clearly shows what area is being observed. Since previously observed images can be displayed, this enables obtaining an overall view of the entire sample.

Obtain Observation Results Without Confusion

(3) Online Profile

Cross-section profiles can be measured in the online window while observing samples.

(4) Image History

Past image data can be displayed next to current observation images for comparison.

Wide Assortment of Scanning Functions

(5) Force Mapping

A force curve can be measured for each point in observed image data to acquire a distribution of sample mechanical properties or adhesion force (special order).

(6) Vector Scanning

The scanning direction, force between the probe and sample, or the applied voltage can be programmed to allow scanning according to a program (special order).

Functionality and Expandability to Meet a Wide Range of Requirements

A generous selection of measurement modes and excellent expandability helps ensure reliable measurements, regardless of the properties that a wide variety of samples may have, such as hardness or electrical conductivity.

With a generous selection of measurement modes, images can be obtained that show other information besides the sample shape, such as electrical current or electrical potential levels, or surface hardness or viscosity properties.

Standard specification

Contact Mode

Dynamic Mode

Phase Mode

Lateral Force Mode (LFM)

Standard specification

Force Modulation Mode

Optional Functions

Nano 3D Mapping

Current Mode

Surface Potential Mode (KFM)

Optional Functions

Magnetic Force Mode (MFM)

Vector Scanning (special order)

Petri Dish Type Solution Cell (special order)

Electrochemical Solution Cell